DeePEB: A Neural Partial Differential Equation Solver for Post Exposure Baking Simulation in Lithography

Qipan Wang, Xiaohan Gao 高笑涵, Yibo Lin, Runsheng Wang, Ru Huang
December, 2022 DFM
Cite DOI
Type
Conference paper
Publication
In Proceedings of the 41st IEEE/ACM International Conference on Computer-Aided Design
ML lithography
Xiaohan Gao 高笑涵
Xiaohan Gao 高笑涵
Ph.D. Student

My research interests mainly include EDA algorithms and AMS circuit design automation.