DeePEB: A Neural Partial Differential Equation Solver for Post Exposure Baking Simulation in Lithography

Publication
In Proceedings of the 41st IEEE/ACM International Conference on Computer-Aided Design
Xiaohan Gao 高笑涵
Xiaohan Gao 高笑涵
Ph.D. Student

My research interests mainly include AI for chip design, optimization algorithms, and ML for robotics.